Internal Friction and Young's Modulus Measurements on SiO2 and Ta2O5 Films Done with an Ultra-High Q Silicon-Wafer Suspension

In order to study the internal friction of thin films a nodal suspension system called GeNS (Gentle Nodal Suspension) has been developed. The key features of this system are: i) the possibility to use substrates easily available like silicon wafers; ii) extremely low excess losses coming from the su...

詳細記述

書誌詳細
主要な著者: Granata M., Balzarini L., Degallaix J., Dolique V., Flaminio R., Forest D., Hofman D., Michel C., Pedurand R., Pinard L., Sassolas B., Straniero N., Teillon J., Cagnoli G.
フォーマット: 論文
言語:English
出版事項: Polish Academy of Sciences 2015-04-01
シリーズ:Archives of Metallurgy and Materials
主題:
オンライン・アクセス:http://www.degruyter.com/view/j/amm.2015.60.issue-1/amm-2015-0060/amm-2015-0060.xml?format=INT