Internal Friction and Young's Modulus Measurements on SiO2 and Ta2O5 Films Done with an Ultra-High Q Silicon-Wafer Suspension
In order to study the internal friction of thin films a nodal suspension system called GeNS (Gentle Nodal Suspension) has been developed. The key features of this system are: i) the possibility to use substrates easily available like silicon wafers; ii) extremely low excess losses coming from the su...
主要な著者: | , , , , , , , , , , , , , |
---|---|
フォーマット: | 論文 |
言語: | English |
出版事項: |
Polish Academy of Sciences
2015-04-01
|
シリーズ: | Archives of Metallurgy and Materials |
主題: | |
オンライン・アクセス: | http://www.degruyter.com/view/j/amm.2015.60.issue-1/amm-2015-0060/amm-2015-0060.xml?format=INT |