Influence of the RF magnetron sputtering power on the optical and electrical properties of AZO films
Thin AZO films were synthesized using radio frequency magnetron sputtering method on the surface of polished silicon samples and glass slides. The sputtering power was varied in the range of 150–300 W with the step of 25W; deposition time was adjusted so that the film thickness remained equal to 70...
| Main Authors: | , , , , , |
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| Format: | Article |
| Language: | English |
| Published: |
Al-Farabi Kazakh National University
2022-10-01
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| Series: | Physical Sciences and Technology |
| Online Access: | https://phst.kaznu.kz/index.php/journal/article/view/343 |