THE ROLE OF BiPO4 INTRODUCED THROUGH THE GAS PHASE IN THE PROCESS OF CREATING THIN FILMS ON THE SURFACE OF InP
Purpose. The purpose of this work was to establish the infl uence of bismuth phosphate introduced through the gas phase on the InP thermal oxidation process and the determination of the composition of the formed fi lms. Methods and Methodology.Oxidation was performed on (100)-oriented polished sin...
| Main Authors: | , , , , |
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| Format: | Article |
| Language: | English |
| Published: |
Voronezh State University
2019-06-01
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| Series: | Конденсированные среды и межфазные границы |
| Subjects: |