Massively parallel direct writing of nanoapertures using multi-optical probes and super-resolution near-fields
Abstract Laser direct-writing enables micro and nanoscale patterning, and is thus widely used for cutting-edge research and industrial applications. Various nanolithography methods, such as near-field, plasmonic, and scanning-probe lithography, are gaining increasing attention because they enable fa...
Main Authors: | , , , , , , , , , |
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Format: | Article |
Language: | English |
Published: |
Nature Publishing Group
2022-09-01
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Series: | Microsystems & Nanoengineering |
Online Access: | https://doi.org/10.1038/s41378-022-00416-9 |