APPLICATION OF 4He2+ AND 3He2+ BEAMS OF THE COMPACT ACCELERATOR “SOKOL” FOR ION BEAM ANALYSIS
Some planar structures have been studied by 4Не2+ ion beam and the backscattering spectrometry. Thicknesses of separate layers were determined in the optical coating consist of 13 alternated Ta2O5 and SiO2 layers on the SiO2 substrate. Oxygen fraction was measured in VN coating formed by ion beam as...
| Main Authors: | , , , , , , , |
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| Format: | Article |
| Language: | English |
| Published: |
V.N. Karazin Kharkiv National University Publishing
2015-09-01
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| Series: | East European Journal of Physics |
| Online Access: | https://periodicals.karazin.ua/eejp/article/view/4014 |