APPLICATION OF 4He2+ AND 3He2+ BEAMS OF THE COMPACT ACCELERATOR “SOKOL” FOR ION BEAM ANALYSIS

APPLICATION OF 4He2+ AND 3He2+ BEAMS OF THE COMPACT ACCELERATOR “SOKOL” FOR ION BEAM ANALYSIS

Some planar structures have been studied by 4Не2+ ion beam and the backscattering spectrometry. Thicknesses of separate layers were determined in the optical coating consist of 13 alternated Ta2O5 and SiO2 layers on the SiO2 substrate. Oxygen fraction was measured in VN coating formed by ion beam as...

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Bibliographic Details
Main Authors:	S. G. Karpus, V. N. Bondarenko, A. V. Goncharov, L. S. Glazunov, A. V. Zats, V. V. Kuz’menko, V. M. Pistryak, V. I. Sukhostavets
Format:	Article
Language:	English
Published:	V.N. Karazin Kharkiv National University Publishing 2015-09-01
Series:	East European Journal of Physics
Online Access:	https://periodicals.karazin.ua/eejp/article/view/4014

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