Investigation of Surface Acoustic Wave Propagation Characteristics in New Multilayer Structure: SiO<sub>2</sub>/IDT/LiNbO<sub>3</sub>/Diamond/Si
Surface acoustic wave (SAW) devices are widely used in many fields such as mobile communication, phased array radar, and wireless passive sensor systems. With the upgrade of mobile networks, the requirements for the performance of SAW devices have also increased, and high-frequency wideband SAW devi...
Main Authors: | , |
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Format: | Article |
Language: | English |
Published: |
MDPI AG
2021-10-01
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Series: | Micromachines |
Subjects: | |
Online Access: | https://www.mdpi.com/2072-666X/12/11/1286 |