Microstructure Evolution with Rapid Thermal Annealing Time in (001)-Oriented Piezoelectric PZT Films Integrated on (111) Si
In our recently published paper (Y.-Y. Wang et al., High performance LaNiO<sub>3</sub>-buffered, (001)-oriented PZT piezoelectric films integrated on (111) Si, <i>Appl. Phys. Lett.</i> 121, 182902, 2022), highly (001)-oriented PZT films with a large transverse piezoelectric c...
| Main Authors: | , , , , |
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| Format: | Article |
| Language: | English |
| Published: |
MDPI AG
2023-03-01
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| Series: | Materials |
| Subjects: | |
| Online Access: | https://www.mdpi.com/1996-1944/16/5/2068 |