A Novel Digital Closed Loop MEMS Accelerometer Utilizing a Charge Pump

A Novel Digital Closed Loop MEMS Accelerometer Utilizing a Charge Pump

This paper presents a novel digital closed loop microelectromechanical system (MEMS) accelerometer with the architecture and experimental evaluation. The complicated timing diagram or complex power supply in published articles are circumvented by using a charge pump system of adjustable output volta...

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Bibliographic Details
Main Authors: Yixing Chu, Jingxin Dong, Baoyong Chi, Yunfeng Liu
Format: Article
Language:English
Published: MDPI AG 2016-03-01
Series:Sensors
Subjects:
MEMS accelerometer
closed loop
sigma delta modulator
charge pump
Online Access:http://www.mdpi.com/1424-8220/16/3/389

Internet

http://www.mdpi.com/1424-8220/16/3/389

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