A Fully Integrated Humidity Sensor System-on-Chip Fabricated by Micro-Stamping Technology
A fully integrated humidity sensor chip was designed, implemented, and tested. Utilizing the micro-stamping technology, the pseudo-3D sensor system-on-chip (SSoC) architecture can be implemented by stacking sensing materials directly on the top of a CMOS-fabricated chip. The fabricated sensor system...
Main Authors: | , , , |
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Format: | Article |
Language: | English |
Published: |
MDPI AG
2012-08-01
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Series: | Sensors |
Subjects: | |
Online Access: | http://www.mdpi.com/1424-8220/12/9/11592 |