A Fully Integrated Humidity Sensor System-on-Chip Fabricated by Micro-Stamping Technology
A fully integrated humidity sensor chip was designed, implemented, and tested. Utilizing the micro-stamping technology, the pseudo-3D sensor system-on-chip (SSoC) architecture can be implemented by stacking sensing materials directly on the top of a CMOS-fabricated chip. The fabricated sensor system...
| المؤلفون الرئيسيون: | , , , |
|---|---|
| التنسيق: | مقال |
| اللغة: | English |
| منشور في: |
MDPI AG
2012-08-01
|
| سلاسل: | Sensors |
| الموضوعات: | |
| الوصول للمادة أونلاين: | http://www.mdpi.com/1424-8220/12/9/11592 |