A Fully Integrated Humidity Sensor System-on-Chip Fabricated by Micro-Stamping Technology

A Fully Integrated Humidity Sensor System-on-Chip Fabricated by Micro-Stamping Technology

A fully integrated humidity sensor chip was designed, implemented, and tested. Utilizing the micro-stamping technology, the pseudo-3D sensor system-on-chip (SSoC) architecture can be implemented by stacking sensing materials directly on the top of a CMOS-fabricated chip. The fabricated sensor system...

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Bibliographic Details
Main Authors: Chih-Ting Lin, Shey-Shi Lu, Yu-Jie Huang, Che-Wei Huang
Format: Article
Language:English
Published: MDPI AG 2012-08-01
Series:Sensors
Subjects:
humidity sensor chip
sensor system-on-chip
polyaniline
micro-stamping process
Online Access:http://www.mdpi.com/1424-8220/12/9/11592

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