All‐Solid‐State Thin Film μ‐Batteries for Microelectronics
Abstract Continuous advances in microelectronics and micro/nanoelectromechanical systems enable the use of microsized energy storage devices, namely solid‐state thin‐film μ‐batteries. Different from the current button batteries, the μ‐battery can directly be integrated on microchips forming a very c...
| Main Authors: | , , , , |
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| Format: | Article |
| Language: | English |
| Published: |
Wiley
2021-10-01
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| Series: | Advanced Science |
| Subjects: | |
| Online Access: | https://doi.org/10.1002/advs.202100774 |