A high frequency SiC nanobeam resonator with ultra-sensitivity

A high frequency SiC nanobeam resonator with ultra-sensitivity

Nanomechanical resonator based on nanomaterials has great potential for high sensitive, high resolution and negligible energy consumed sensing devices. In this work, high frequency SiC nanobeam resonators with a diameter of ∼100 nm and with lengths of tens of micrometers were designed and demonstrat...

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Bibliographic Details
Main Authors: Pengfei Xu, Dazhi Wang, Yichang Cui, Yu Zhang, Jianqiao He, Liangkun Lu, Yikang Li, Xiangji Chen, Chang Liu, Peiran Li, Yan Cui, Liujia Suo
Format: Article
Language:English
Published: Elsevier 2023-09-01
Series:Materials & Design
Subjects:
Nanomechanical resonator
Silicon carbide nanowires
Nanoelectromechanical systems
High resonant frequency
High electrostatic tunability
Online Access:http://www.sciencedirect.com/science/article/pii/S026412752300641X

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http://www.sciencedirect.com/science/article/pii/S026412752300641X

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