Focused and TSOM Images Two-Input Deep-Learning Method for Through-Focus Scanning Measuring
Through-focus scanning optical microscopy (TSOM) is one of the recommended measurement methods in semiconductor manufacturing industry in recent years because of its rapid and nondestructive properties. As a computational imaging method, TSOM takes full advantage of the information from defocused im...
| Main Authors: | , , , |
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| Format: | Article |
| Language: | English |
| Published: |
MDPI AG
2022-03-01
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| Series: | Applied Sciences |
| Subjects: | |
| Online Access: | https://www.mdpi.com/2076-3417/12/7/3430 |