Focused and TSOM Images Two-Input Deep-Learning Method for Through-Focus Scanning Measuring

Focused and TSOM Images Two-Input Deep-Learning Method for Through-Focus Scanning Measuring

Through-focus scanning optical microscopy (TSOM) is one of the recommended measurement methods in semiconductor manufacturing industry in recent years because of its rapid and nondestructive properties. As a computational imaging method, TSOM takes full advantage of the information from defocused im...

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Bibliographic Details
Main Authors: Zhange Zhang, Jiajun Ren, Renju Peng, Yufu Qu
Format: Article
Language:English
Published: MDPI AG 2022-03-01
Series:Applied Sciences
Subjects:
deep learning
dimensional measurement
computational imaging
through-focus scanning optical microscopy
Online Access:https://www.mdpi.com/2076-3417/12/7/3430

Internet

https://www.mdpi.com/2076-3417/12/7/3430

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