Focused and TSOM Images Two-Input Deep-Learning Method for Through-Focus Scanning Measuring
Through-focus scanning optical microscopy (TSOM) is one of the recommended measurement methods in semiconductor manufacturing industry in recent years because of its rapid and nondestructive properties. As a computational imaging method, TSOM takes full advantage of the information from defocused im...
Main Authors: | Zhange Zhang, Jiajun Ren, Renju Peng, Yufu Qu |
---|---|
Format: | Article |
Language: | English |
Published: |
MDPI AG
2022-03-01
|
Series: | Applied Sciences |
Subjects: | |
Online Access: | https://www.mdpi.com/2076-3417/12/7/3430 |
Similar Items
-
MEMS High Aspect Ratio Trench Three-Dimensional Measurement Using Through-Focus Scanning Optical Microscopy and Deep Learning Method
by: Guannan Li, et al.
Published: (2022-08-01) -
Investigation of Shape-from-Focus Precision by Texture Frequency Analysis
by: Shinya Onogi, et al.
Published: (2021-08-01) -
Extended Dual-Focus Microscopy for Ratiometric-Based 3D Movement Tracking
by: Seohyun Lee, et al.
Published: (2020-09-01) -
HiLo Based Line Scanning Temporal Focusing Microscopy for High-Speed, Deep Tissue Imaging
by: Ruheng Shi, et al.
Published: (2021-08-01) -
A Continuous Motion Shape-from-Focus Method for Geometry Measurement during 3D Printing
by: Jona Gladines, et al.
Published: (2022-12-01)