Modeling of metastable phase formation diagrams for sputtered thin films
A method to model the metastable phase formation in the Cu–W system based on the critical surface diffusion distance has been developed. The driver for the formation of a second phase is the critical diffusion distance which is dependent on the solubility of W in Cu and on the solubility of Cu in W....
Main Authors: | , , , , , |
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Format: | Article |
Language: | English |
Published: |
Taylor & Francis Group
2016-01-01
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Series: | Science and Technology of Advanced Materials |
Subjects: | |
Online Access: | http://dx.doi.org/10.1080/14686996.2016.1167572 |