Modeling of metastable phase formation diagrams for sputtered thin films

A method to model the metastable phase formation in the Cu–W system based on the critical surface diffusion distance has been developed. The driver for the formation of a second phase is the critical diffusion distance which is dependent on the solubility of W in Cu and on the solubility of Cu in W....

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Bibliographic Details
Main Authors: Keke Chang, Denis Music, Moritz to Baben, Dennis Lange, Hamid Bolvardi, Jochen M. Schneider
Format: Article
Language:English
Published: Taylor & Francis Group 2016-01-01
Series:Science and Technology of Advanced Materials
Subjects:
Online Access:http://dx.doi.org/10.1080/14686996.2016.1167572