Static High Voltage Actuation of Piezoelectric AlN and AlScN Based Scanning Micromirrors

Static High Voltage Actuation of Piezoelectric AlN and AlScN Based Scanning Micromirrors

Piezoelectric micromirrors with aluminum nitride (AlN) and aluminum scandium nitride (Al<sub>0.68</sub>Sc<sub>0.32</sub>N) are presented and compared regarding their static deflection. Two chip designs with 2 × 3 mm<sup>2</sup> (Design 1) and 4 × 6 mm<sup>2&...

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Bibliographic Details
Main Authors: Chris Stoeckel, Katja Meinel, Marcel Melzer, Agnė Žukauskaitė, Sven Zimmermann, Roman Forke, Karla Hiller, Harald Kuhn
Format: Article
Language:English
Published: MDPI AG 2022-04-01
Series:Micromachines
Subjects:
AlN
AlScN
aluminum nitride
aluminum scandium nitride
micromirror
microscanner
Online Access:https://www.mdpi.com/2072-666X/13/4/625

Internet

https://www.mdpi.com/2072-666X/13/4/625

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