Direct graphene synthesis on LiNbO3 substrate by C implantation on Cu covering layer
We directly synthesized multi-layer graphene with an area of several hundred square microns on the lithium niobate (LN, LiNbO _3 ) substrate by Carbon (C) implantation into the copper (Cu)-covered LiNbO _3 . The energy of C ion implantation was optimized per SRIM simulation to ensure that the distri...
Main Authors: | , , , |
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Format: | Article |
Language: | English |
Published: |
IOP Publishing
2022-01-01
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Series: | Materials Research Express |
Subjects: | |
Online Access: | https://doi.org/10.1088/2053-1591/ac9f03 |