Direct graphene synthesis on LiNbO3 substrate by C implantation on Cu covering layer
We directly synthesized multi-layer graphene with an area of several hundred square microns on the lithium niobate (LN, LiNbO _3 ) substrate by Carbon (C) implantation into the copper (Cu)-covered LiNbO _3 . The energy of C ion implantation was optimized per SRIM simulation to ensure that the distri...
| Main Authors: | , , , |
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| Format: | Article |
| Language: | English |
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IOP Publishing
2022-01-01
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| Series: | Materials Research Express |
| Subjects: | |
| Online Access: | https://doi.org/10.1088/2053-1591/ac9f03 |
| _version_ | 1797746275984080896 |
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| author | Yuhang Xu Fei Lu Yifan Liu Changdong Ma |
| author_facet | Yuhang Xu Fei Lu Yifan Liu Changdong Ma |
| author_sort | Yuhang Xu |
| collection | DOAJ |
| description | We directly synthesized multi-layer graphene with an area of several hundred square microns on the lithium niobate (LN, LiNbO _3 ) substrate by Carbon (C) implantation into the copper (Cu)-covered LiNbO _3 . The energy of C ion implantation was optimized per SRIM simulation to ensure that the distribution of C covers the Cu/LiNbO _3 interface. The optimized energy was established at 55 keV, such that the formation of C peaks in the respective materials on each side of the Cu/LiNbO _3 interface. The diffusion of the accumulated C to the Cu/LiNbO _3 interface can form a more uniform C distribution at the interface, which is beneficial to the synthesis of graphene. Following the annealing process and removal of the Cu coating, a multi-layer graphene with an area of several hundred square microns on the surface of LiNbO _3 was identified and characterized using Scanning Electron Microscopy (SEM), Energy-Dispersive x-ray Spectroscopy (EDS), Raman spectroscopy, and Atomic Force Microscopy (AFM). This remarkable advancement encourages the industrialization of direct graphene synthesis on LiNbO _3 substrates via ion implantation. |
| first_indexed | 2024-03-12T15:35:27Z |
| format | Article |
| id | doaj.art-7e3e907ba7944dfa869d1f1941b3d4f2 |
| institution | Directory Open Access Journal |
| issn | 2053-1591 |
| language | English |
| last_indexed | 2024-03-12T15:35:27Z |
| publishDate | 2022-01-01 |
| publisher | IOP Publishing |
| record_format | Article |
| series | Materials Research Express |
| spelling | doaj.art-7e3e907ba7944dfa869d1f1941b3d4f22023-08-09T16:15:33ZengIOP PublishingMaterials Research Express2053-15912022-01-0191111560210.1088/2053-1591/ac9f03Direct graphene synthesis on LiNbO3 substrate by C implantation on Cu covering layerYuhang Xu0https://orcid.org/0000-0003-0138-7967Fei Lu1https://orcid.org/0000-0002-4868-8946Yifan Liu2Changdong Ma3School of Information Science and Engineering, Shandong University , Qingdao, People’s Republic of ChinaSchool of Information Science and Engineering, Shandong University , Qingdao, People’s Republic of ChinaSchool of Information Science and Engineering, Shandong University , Qingdao, People’s Republic of ChinaDepartment of Radiation Oncology, Qilu Hospital of Shandong University , Jinan, People’s Republic of ChinaWe directly synthesized multi-layer graphene with an area of several hundred square microns on the lithium niobate (LN, LiNbO _3 ) substrate by Carbon (C) implantation into the copper (Cu)-covered LiNbO _3 . The energy of C ion implantation was optimized per SRIM simulation to ensure that the distribution of C covers the Cu/LiNbO _3 interface. The optimized energy was established at 55 keV, such that the formation of C peaks in the respective materials on each side of the Cu/LiNbO _3 interface. The diffusion of the accumulated C to the Cu/LiNbO _3 interface can form a more uniform C distribution at the interface, which is beneficial to the synthesis of graphene. Following the annealing process and removal of the Cu coating, a multi-layer graphene with an area of several hundred square microns on the surface of LiNbO _3 was identified and characterized using Scanning Electron Microscopy (SEM), Energy-Dispersive x-ray Spectroscopy (EDS), Raman spectroscopy, and Atomic Force Microscopy (AFM). This remarkable advancement encourages the industrialization of direct graphene synthesis on LiNbO _3 substrates via ion implantation.https://doi.org/10.1088/2053-1591/ac9f03graphenedirect synthesislithium niobate substratecarbon ion implantationcopper filmannealing |
| spellingShingle | Yuhang Xu Fei Lu Yifan Liu Changdong Ma Direct graphene synthesis on LiNbO3 substrate by C implantation on Cu covering layer Materials Research Express graphene direct synthesis lithium niobate substrate carbon ion implantation copper film annealing |
| title | Direct graphene synthesis on LiNbO3 substrate by C implantation on Cu covering layer |
| title_full | Direct graphene synthesis on LiNbO3 substrate by C implantation on Cu covering layer |
| title_fullStr | Direct graphene synthesis on LiNbO3 substrate by C implantation on Cu covering layer |
| title_full_unstemmed | Direct graphene synthesis on LiNbO3 substrate by C implantation on Cu covering layer |
| title_short | Direct graphene synthesis on LiNbO3 substrate by C implantation on Cu covering layer |
| title_sort | direct graphene synthesis on linbo3 substrate by c implantation on cu covering layer |
| topic | graphene direct synthesis lithium niobate substrate carbon ion implantation copper film annealing |
| url | https://doi.org/10.1088/2053-1591/ac9f03 |
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