Direct graphene synthesis on LiNbO3 substrate by C implantation on Cu covering layer

Direct graphene synthesis on LiNbO3 substrate by C implantation on Cu covering layer

We directly synthesized multi-layer graphene with an area of several hundred square microns on the lithium niobate (LN, LiNbO _3 ) substrate by Carbon (C) implantation into the copper (Cu)-covered LiNbO _3 . The energy of C ion implantation was optimized per SRIM simulation to ensure that the distri...

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Bibliographic Details
Main Authors: Yuhang Xu, Fei Lu, Yifan Liu, Changdong Ma
Format: Article
Language:English
Published: IOP Publishing 2022-01-01
Series:Materials Research Express
Subjects:
graphene
direct synthesis
lithium niobate substrate
carbon ion implantation
copper film
annealing
Online Access:https://doi.org/10.1088/2053-1591/ac9f03

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