Fabrication Process for Deep Submicron SQUID Circuits with Three Independent Niobium Layers

Fabrication Process for Deep Submicron SQUID Circuits with Three Independent Niobium Layers

We present a fabrication technology for nanoscale superconducting quantum interference devices (SQUIDs) with overdamped superconductor-normal metal-superconductor (SNS) trilayer Nb/HfTi/Nb Josephson junctions. A combination of electron-beam lithography with chemical-mechanical polishing and magnetro...

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Bibliographic Details
Main Authors: Silke Wolter, Julian Linek, Josepha Altmann, Thomas Weimann, Sylke Bechstein, Reinhold Kleiner, Jörn Beyer, Dieter Koelle, Oliver Kieler
Format: Article
Language:English
Published: MDPI AG 2021-03-01
Series:Micromachines
Subjects:
low-temperature superconductors
nanotechnology
SQUID
niobium technology
Online Access:https://www.mdpi.com/2072-666X/12/4/350

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https://www.mdpi.com/2072-666X/12/4/350

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