Self-Oscillation-Based Frequency Tracking for the Drive and Detection of Resonance Magnetometers
This paper reports a drive and detection method for Micro-Electro-Mechanical System (MEMS)-based Lorentz-force resonance magnetometers. Based on the proposed MEMS magnetometer, a drive and detection method was developed by using self-oscillation to adjust the mismatch between the mechanical resonanc...
Main Authors: | , , |
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Format: | Article |
Language: | English |
Published: |
MDPI AG
2016-05-01
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Series: | Sensors |
Subjects: | |
Online Access: | http://www.mdpi.com/1424-8220/16/5/744 |