Design, Fabrication, and Testing of a Bulk Micromachined Inertial Measurement Unit

Design, Fabrication, and Testing of a Bulk Micromachined Inertial Measurement Unit

A bulk micromachined inertial measurement unit (MIMU) is presented in this paper. Three single-axis accelerometers and three single-axis gyroscopes were simultaneously fabricated on a silicon wafer using a bulk micromachining process; the wafer is smaller than one square centimeter. In particular, a...

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Bibliographic Details
Main Authors: Honglong Chang, Qiang Shen, Zhiguang Zhou, Jianbing Xie, Qinghua Jiang, Weizheng Yuan
Format: Article
Language:English
Published: MDPI AG 2010-04-01
Series:Sensors
Subjects:
MEMS
MIMU
bulk micromachining
gyroscope
accelerometer
Online Access:http://www.mdpi.com/1424-8220/10/4/3835/

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http://www.mdpi.com/1424-8220/10/4/3835/

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