Gripping and frictional-conveying characteristics of fine protrusions formed by sputter-etching of stainless steels
Argon ion sputter-etching of SUS420J2 and SUS316 stainless steels was carried out at a power of 250W for 10.8ks to form cone-shaped sharp protrusions with bottom diameter of 10-30 μm and fine quasi-column-shaped protrusions with diameter smaller than 500 nm respectively by using a radio-frequency ma...
| Main Authors: | , , |
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| Format: | Article |
| Language: | Japanese |
| Published: |
The Japan Society of Mechanical Engineers
2018-05-01
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| Series: | Nihon Kikai Gakkai ronbunshu |
| Subjects: | |
| Online Access: | https://www.jstage.jst.go.jp/article/transjsme/84/862/84_17-00360/_pdf/-char/en |