A Novel Defect Inspection System Using Convolutional Neural Network for MEMS Pressure Sensors
Defect inspection using imaging-processing techniques, which detects and classifies manufacturing defects, plays a significant role in the quality control of microelectromechanical systems (MEMS) sensors in the semiconductor industry. However, high-precision classification and location are still cha...
| Main Authors: | , , , , , |
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| Format: | Article |
| Language: | English |
| Published: |
MDPI AG
2022-09-01
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| Series: | Journal of Imaging |
| Subjects: | |
| Online Access: | https://www.mdpi.com/2313-433X/8/10/268 |