Graphene-driving novel strain relaxation towards AlN film and DUV photoelectronic devices
Graphene-driving strain-pre-store engineering enables the epitaxy of strain-free AlN film with low dislocation density for high efficiency DUV-LEDs.
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| Format: | Article |
| Language: | English |
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Nature Publishing Group
2022-05-01
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| Series: | Light: Science & Applications |
| Online Access: | https://doi.org/10.1038/s41377-022-00861-1 |