Multi-Level Analog Resistive Switching Characteristics in Tri-Layer HfO<sub>2</sub>/Al<sub>2</sub>O<sub>3</sub>/HfO<sub>2</sub> Based Memristor on ITO Electrode

Atomic layer deposited (ALD) HfO<sub>2</sub>/Al<sub>2</sub>O<sub>3</sub>/HfO<sub>2</sub> tri-layer resistive random access memory (RRAM) structure has been studied with a transparent indium tin oxide (ITO) transparent electrode. Highly stable and relia...

Full description

Bibliographic Details
Main Authors: Chandreswar Mahata, Myounggon Kang, Sungjun Kim
Format: Article
Language:English
Published: MDPI AG 2020-10-01
Series:Nanomaterials
Subjects:
Online Access:https://www.mdpi.com/2079-4991/10/10/2069
_version_ 1797550462456561664
author Chandreswar Mahata
Myounggon Kang
Sungjun Kim
author_facet Chandreswar Mahata
Myounggon Kang
Sungjun Kim
author_sort Chandreswar Mahata
collection DOAJ
description Atomic layer deposited (ALD) HfO<sub>2</sub>/Al<sub>2</sub>O<sub>3</sub>/HfO<sub>2</sub> tri-layer resistive random access memory (RRAM) structure has been studied with a transparent indium tin oxide (ITO) transparent electrode. Highly stable and reliable multilevel conductance can be controlled by the set current compliance and reset stop voltage in bipolar resistive switching. Improved gradual resistive switching was achieved because of the interdiffusion in the HfO<sub>2</sub>/Al<sub>2</sub>O<sub>3</sub> interface where tri-valent Al incorporates with HfO<sub>2</sub> and produces HfAlO. The uniformity in bipolar resistive switching with I<sub>on</sub>/I<sub>off</sub> ratio (>10) and excellent endurance up to >10<sup>3</sup> cycles was achieved. Multilevel conductance levels in potentiation/depression were realized with constant amplitude pulse train and increasing pulse amplitude. Thus, tri-layer structure-based RRAM can be a potential candidate for the synaptic device in neuromorphic computing.
first_indexed 2024-03-10T15:29:39Z
format Article
id doaj.art-7f0401612fb9411f9a942096fb0a5e03
institution Directory Open Access Journal
issn 2079-4991
language English
last_indexed 2024-03-10T15:29:39Z
publishDate 2020-10-01
publisher MDPI AG
record_format Article
series Nanomaterials
spelling doaj.art-7f0401612fb9411f9a942096fb0a5e032023-11-20T17:45:36ZengMDPI AGNanomaterials2079-49912020-10-011010206910.3390/nano10102069Multi-Level Analog Resistive Switching Characteristics in Tri-Layer HfO<sub>2</sub>/Al<sub>2</sub>O<sub>3</sub>/HfO<sub>2</sub> Based Memristor on ITO ElectrodeChandreswar Mahata0Myounggon Kang1Sungjun Kim2School of Electronics Engineering, Chungbuk National University, Cheongju 28644, KoreaDepartment of Electronics Engineering, Korea National University of Transportation, Chungju-si 27469, KoreaDivision of Electronics and Electrical Engineering, Dongguk University, Seoul 04620, KoreaAtomic layer deposited (ALD) HfO<sub>2</sub>/Al<sub>2</sub>O<sub>3</sub>/HfO<sub>2</sub> tri-layer resistive random access memory (RRAM) structure has been studied with a transparent indium tin oxide (ITO) transparent electrode. Highly stable and reliable multilevel conductance can be controlled by the set current compliance and reset stop voltage in bipolar resistive switching. Improved gradual resistive switching was achieved because of the interdiffusion in the HfO<sub>2</sub>/Al<sub>2</sub>O<sub>3</sub> interface where tri-valent Al incorporates with HfO<sub>2</sub> and produces HfAlO. The uniformity in bipolar resistive switching with I<sub>on</sub>/I<sub>off</sub> ratio (>10) and excellent endurance up to >10<sup>3</sup> cycles was achieved. Multilevel conductance levels in potentiation/depression were realized with constant amplitude pulse train and increasing pulse amplitude. Thus, tri-layer structure-based RRAM can be a potential candidate for the synaptic device in neuromorphic computing.https://www.mdpi.com/2079-4991/10/10/2069HfO<sub>2</sub>/Al<sub>2</sub>O<sub>3</sub>/HfO<sub>2</sub> tri-layer RRAMtransparent electrodemultilevel conductancesynaptic properties
spellingShingle Chandreswar Mahata
Myounggon Kang
Sungjun Kim
Multi-Level Analog Resistive Switching Characteristics in Tri-Layer HfO<sub>2</sub>/Al<sub>2</sub>O<sub>3</sub>/HfO<sub>2</sub> Based Memristor on ITO Electrode
Nanomaterials
HfO<sub>2</sub>/Al<sub>2</sub>O<sub>3</sub>/HfO<sub>2</sub> tri-layer RRAM
transparent electrode
multilevel conductance
synaptic properties
title Multi-Level Analog Resistive Switching Characteristics in Tri-Layer HfO<sub>2</sub>/Al<sub>2</sub>O<sub>3</sub>/HfO<sub>2</sub> Based Memristor on ITO Electrode
title_full Multi-Level Analog Resistive Switching Characteristics in Tri-Layer HfO<sub>2</sub>/Al<sub>2</sub>O<sub>3</sub>/HfO<sub>2</sub> Based Memristor on ITO Electrode
title_fullStr Multi-Level Analog Resistive Switching Characteristics in Tri-Layer HfO<sub>2</sub>/Al<sub>2</sub>O<sub>3</sub>/HfO<sub>2</sub> Based Memristor on ITO Electrode
title_full_unstemmed Multi-Level Analog Resistive Switching Characteristics in Tri-Layer HfO<sub>2</sub>/Al<sub>2</sub>O<sub>3</sub>/HfO<sub>2</sub> Based Memristor on ITO Electrode
title_short Multi-Level Analog Resistive Switching Characteristics in Tri-Layer HfO<sub>2</sub>/Al<sub>2</sub>O<sub>3</sub>/HfO<sub>2</sub> Based Memristor on ITO Electrode
title_sort multi level analog resistive switching characteristics in tri layer hfo sub 2 sub al sub 2 sub o sub 3 sub hfo sub 2 sub based memristor on ito electrode
topic HfO<sub>2</sub>/Al<sub>2</sub>O<sub>3</sub>/HfO<sub>2</sub> tri-layer RRAM
transparent electrode
multilevel conductance
synaptic properties
url https://www.mdpi.com/2079-4991/10/10/2069
work_keys_str_mv AT chandreswarmahata multilevelanalogresistiveswitchingcharacteristicsintrilayerhfosub2subalsub2subosub3subhfosub2subbasedmemristoronitoelectrode
AT myounggonkang multilevelanalogresistiveswitchingcharacteristicsintrilayerhfosub2subalsub2subosub3subhfosub2subbasedmemristoronitoelectrode
AT sungjunkim multilevelanalogresistiveswitchingcharacteristicsintrilayerhfosub2subalsub2subosub3subhfosub2subbasedmemristoronitoelectrode