Imaging MEMS motion at nano scale by time-resolved scanning electron microscopy

Bibliographic Details
Main Authors:	Zaghloul Mohamed, Mehr Abbas Kosari, Bertacco Riccardo, Cuccurullo Simone, Maspero Federico, Pavese Giulia, Chen Hao, Ghisi Aldo, Corigliano Alberto, Pietralunga Silvia M., Tagliaferri Alberto
Format:	Article
Language:	English
Published:	EDP Sciences 2024-01-01
Series:	BIO Web of Conferences
Subjects:	mems sem dynamics nanoscale strain
Online Access:	https://www.bio-conferences.org/articles/bioconf/pdf/2024/48/bioconf_emc2024_09006.pdf

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