A one-step, tunable method of selective reactive sputter deposition as a wrinkling approach for silver/polydimethylsiloxane for electrically conductive pliable surfaces

Bibliographic Details
Main Authors:	Joel Y. Y. Loh, Ali Zeineddine, Moein Shayegannia, Robyn McNeil, Liam McRae, Nazir P. Kherani
Format:	Article
Language:	English
Published:	Nature Publishing Group 2022-08-01
Series:	Microsystems & Nanoengineering
Online Access:	https://doi.org/10.1038/s41378-022-00420-z

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