Short-Range Six-Axis Interferometer Controlled Positioning for Scanning Probe Microscopy

Short-Range Six-Axis Interferometer Controlled Positioning for Scanning Probe Microscopy

We present a design of a nanometrology measuring setup which is a part of the national standard instrumentation for nanometrology operated by the Czech Metrology Institute (CMI) in Brno, Czech Republic. The system employs a full six-axis interferometric position measurement of the sample holder cons...

Full description

Bibliographic Details
Main Authors: Josef Lazar, Petr Klapetek, Miroslav Valtr, Jan Hrabina, Zdenek Buchta, Onrej Cip, Martin Cizek, Jindrich Oulehla, Mojmir Sery
Format: Article
Language:English
Published: MDPI AG 2014-01-01
Series:Sensors
Subjects:
nanometrology
nanopositioning interferometry
AFM
nanoscale
Online Access:http://www.mdpi.com/1424-8220/14/1/877

Internet

http://www.mdpi.com/1424-8220/14/1/877

Similar Items