Artificial Immune System for Fault Detection and Classification of Semiconductor Equipment

Artificial Immune System for Fault Detection and Classification of Semiconductor Equipment

Semiconductor manufacturing comprises hundreds of consecutive unit processes. A single misprocess could jeopardize the whole manufacturing process. In current manufacturing environments, data monitoring of equipment condition, wafer metrology, and inspection, etc., are used to probe any anomaly duri...

Full description

Bibliographic Details
Main Authors: Hyoeun Park, Jeong Eun Choi, Dohyun Kim, Sang Jeen Hong
Format: Article
Language:English
Published: MDPI AG 2021-04-01
Series:Electronics
Subjects:
artificial immune system
fault detection
data mining
decision making
semiconductor equipment
Online Access:https://www.mdpi.com/2079-9292/10/8/944

Internet

https://www.mdpi.com/2079-9292/10/8/944

Similar Items