Artificial Immune System for Fault Detection and Classification of Semiconductor Equipment

Artificial Immune System for Fault Detection and Classification of Semiconductor Equipment

Semiconductor manufacturing comprises hundreds of consecutive unit processes. A single misprocess could jeopardize the whole manufacturing process. In current manufacturing environments, data monitoring of equipment condition, wafer metrology, and inspection, etc., are used to probe any anomaly duri...

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Bibliographic Details
Main Authors: Hyoeun Park, Jeong Eun Choi, Dohyun Kim, Sang Jeen Hong
Format: Article
Language:English
Published: MDPI AG 2021-04-01
Series:Electronics
Subjects:
artificial immune system
fault detection
data mining
decision making
semiconductor equipment
Online Access:https://www.mdpi.com/2079-9292/10/8/944

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