Design and Measurement of Microelectromechanical Three-Axis Magnetic Field Sensors Based on the CMOS Technique

Design and Measurement of Microelectromechanical Three-Axis Magnetic Field Sensors Based on the CMOS Technique

The design, fabrication, and measurement of a microelectromechanical system (MEMS) three-axis magnetic field sensor (MFS) based on the commercial complementary metal oxide semiconductor (CMOS) process are investigated. The MFS is a magnetic transistor type. The performance of the MFS was analyzed em...

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Bibliographic Details
Main Authors: Chi-Han Wu, Cheng-Chih Hsu, Yao-Chuan Tsai, Chi-Yuan Lee, Ching-Liang Dai
Format: Article
Language:English
Published: MDPI AG 2023-05-01
Series:Micromachines
Subjects:
three-axis magnetic field sensor
cross-sensitivity
sensitivity
MEMS
CMOS
Online Access:https://www.mdpi.com/2072-666X/14/5/1038

Internet

https://www.mdpi.com/2072-666X/14/5/1038

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