STRUCTURE AND COMPOSITION EVOLUTION a-Si/ZrO2 AND a-SiOx/ZrO2 MULTILAYERED NANOPERIODICAL STRUCTURES UNDER HIGH TEMPERATURE ANNEAL

STRUCTURE AND COMPOSITION EVOLUTION a-Si/ZrO2 AND a-SiOx/ZrO2 MULTILAYERED NANOPERIODICAL STRUCTURES UNDER HIGH TEMPERATURE ANNEAL

With the use of scanning electron microscopy, atomic force microscopy and X-ray diffraction the morphology, composition and structure evolution of a-Si/ZrO2 and a-SiOx/ZrO2 multilayered nanoperiodical structures subjected to high temperature annealing were investigated. Each ZrO2 layers thickness w...

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Bibliographic Details
Main Authors: Sergey Yu. Turishchev, Dmitry A. Koyuda, Alexey V. Ershov, Ulii A. Vainer, Tatiana V. Kulikova, Boris L. Agapov, Elena N. Zinchenko, Margarita V. Grechkina, Daria S. Usoltseva, Vladimir A. Terekhov
Format: Article
Language:English
Published: Voronezh State University 2018-09-01
Series:Конденсированные среды и межфазные границы
Subjects:
multilayer nanoperiodal structures
nanocrystals
silicon
silicon oxides
phase composition
X-ray diffraction
atomic force microscopy
scanning electron microscopy.

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