Multicomponent Thin Films Deposited by PVD ARC and LARC Technology
<em></em><p>The paper is focused on a comparison of advanced layers deposited by two coating technologies – cathodic arc deposition (ARC) and lateral rotating cathodes (LARC). For characterization standard analyses were selected: the determination of the layer wear resistance by Ca...
| Main Authors: | , , |
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| Format: | Article |
| Language: | English |
| Published: |
Kaunas University of Technology
2014-04-01
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| Series: | Medžiagotyra |
| Subjects: | |
| Online Access: | http://matsc.ktu.lt/index.php/MatSc/article/view/3716 |