Multicomponent Thin Films Deposited by PVD ARC and LARC Technology
<em></em><p>The paper is focused on a comparison of advanced layers deposited by two coating technologies – cathodic arc deposition (ARC) and lateral rotating cathodes (LARC). For characterization standard analyses were selected: the determination of the layer wear resistance by Ca...
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| Format: | Article |
| Language: | English |
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Kaunas University of Technology
2014-04-01
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| Series: | Medžiagotyra |
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| Online Access: | http://matsc.ktu.lt/index.php/MatSc/article/view/3716 |
| _version_ | 1818334545485758464 |
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| author | Dagmar JAKUBÉCZYOVÁ Marek KOČÍK Pavol HVIZDOŠ |
| author_facet | Dagmar JAKUBÉCZYOVÁ Marek KOČÍK Pavol HVIZDOŠ |
| author_sort | Dagmar JAKUBÉCZYOVÁ |
| collection | DOAJ |
| description | <em></em><p>The paper is focused on a comparison of advanced layers deposited by two coating technologies – cathodic arc deposition (ARC) and lateral rotating cathodes (LARC). For characterization standard analyses were selected: the determination of the layer wear resistance by Calotest method, specification of the depth concentration profiles of constituting elements from the coating surface down to the substrate, and measurement of the nanohardness at dynamic loading. The thickness of the CrTiN layer reached 1380 nm<sub> </sub>–<sub> </sub>1740 nm and that of the multi/nanolayers AlXN3 was 2630 nm<sub> </sub>–<sub> </sub>3160 nm. The coating nanohardness on the surface attained 39 GPa for AlXN3 (X = Cr), 33 GPa for CrTiN and 12.5 GPa for the substrate. Only at coating prepared by LARC-Technology it is possible to create the multilayers of nanometric dimensions. AlXN3 coating was formed by 48 layers with dimensions of 58 nm<sub> </sub>–<sub> </sub>70 nm. These nanolayers lead to the increase of system toughness as they prevent the crack propagation. Their application on the tools and components promises to increase their durability under service conditions.</p><p>DOI: <a href="http://dx.doi.org/10.5755/j01.ms.20.1.3716">http://dx.doi.org/10.5755/j01.ms.20.1.3716</a></p> |
| first_indexed | 2024-12-13T14:09:14Z |
| format | Article |
| id | doaj.art-7ffe3d0876d0425a9be366aec6654e42 |
| institution | Directory Open Access Journal |
| issn | 1392-1320 2029-7289 |
| language | English |
| last_indexed | 2024-12-13T14:09:14Z |
| publishDate | 2014-04-01 |
| publisher | Kaunas University of Technology |
| record_format | Article |
| series | Medžiagotyra |
| spelling | doaj.art-7ffe3d0876d0425a9be366aec6654e422022-12-21T23:42:30ZengKaunas University of TechnologyMedžiagotyra1392-13202029-72892014-04-01201364110.5755/j01.ms.20.1.37162956Multicomponent Thin Films Deposited by PVD ARC and LARC TechnologyDagmar JAKUBÉCZYOVÁ0Marek KOČÍK1Pavol HVIZDOŠ2Institute of Materials Research Slovak Academy of Sciences Watsonova 47 040 01 Košice Slovak RepublicInstitute of Materials Research Slovak Academy of Sciences Watsonova 47 040 01 Košice Slovak RepublicInstitute of Materials Research Slovak Academy of Sciences Watsonova 47 040 01 Košice Slovak Republic<em></em><p>The paper is focused on a comparison of advanced layers deposited by two coating technologies – cathodic arc deposition (ARC) and lateral rotating cathodes (LARC). For characterization standard analyses were selected: the determination of the layer wear resistance by Calotest method, specification of the depth concentration profiles of constituting elements from the coating surface down to the substrate, and measurement of the nanohardness at dynamic loading. The thickness of the CrTiN layer reached 1380 nm<sub> </sub>–<sub> </sub>1740 nm and that of the multi/nanolayers AlXN3 was 2630 nm<sub> </sub>–<sub> </sub>3160 nm. The coating nanohardness on the surface attained 39 GPa for AlXN3 (X = Cr), 33 GPa for CrTiN and 12.5 GPa for the substrate. Only at coating prepared by LARC-Technology it is possible to create the multilayers of nanometric dimensions. AlXN3 coating was formed by 48 layers with dimensions of 58 nm<sub> </sub>–<sub> </sub>70 nm. These nanolayers lead to the increase of system toughness as they prevent the crack propagation. Their application on the tools and components promises to increase their durability under service conditions.</p><p>DOI: <a href="http://dx.doi.org/10.5755/j01.ms.20.1.3716">http://dx.doi.org/10.5755/j01.ms.20.1.3716</a></p>http://matsc.ktu.lt/index.php/MatSc/article/view/3716Thin filmsPVDcalotestGDOESnanohardness |
| spellingShingle | Dagmar JAKUBÉCZYOVÁ Marek KOČÍK Pavol HVIZDOŠ Multicomponent Thin Films Deposited by PVD ARC and LARC Technology Medžiagotyra Thin films PVD calotest GDOES nanohardness |
| title | Multicomponent Thin Films Deposited by PVD ARC and LARC Technology |
| title_full | Multicomponent Thin Films Deposited by PVD ARC and LARC Technology |
| title_fullStr | Multicomponent Thin Films Deposited by PVD ARC and LARC Technology |
| title_full_unstemmed | Multicomponent Thin Films Deposited by PVD ARC and LARC Technology |
| title_short | Multicomponent Thin Films Deposited by PVD ARC and LARC Technology |
| title_sort | multicomponent thin films deposited by pvd arc and larc technology |
| topic | Thin films PVD calotest GDOES nanohardness |
| url | http://matsc.ktu.lt/index.php/MatSc/article/view/3716 |
| work_keys_str_mv | AT dagmarjakubeczyova multicomponentthinfilmsdepositedbypvdarcandlarctechnology AT marekkocik multicomponentthinfilmsdepositedbypvdarcandlarctechnology AT pavolhvizdos multicomponentthinfilmsdepositedbypvdarcandlarctechnology |