Unveiling the growth mode and structure relaxation of Polytetrafluoroethylene film by radio-frequency magnetron sputtering
Relying on radio-frequency (RF) magnetron sputtering, Polytetrafluoroethylene (PTFE) films with a series of thicknesses in the range from 80 to 2000 nm were prepared on silicon substrates. The surface morphology and roughness of the PTFE films were measured by atomic force microscope (AFM) technolog...
| Main Authors: | , , , , |
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| Format: | Article |
| Language: | English |
| Published: |
IOP Publishing
2022-01-01
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| Series: | Materials Research Express |
| Subjects: | |
| Online Access: | https://doi.org/10.1088/2053-1591/ac9218 |