Integrated nano-opto-electro-mechanical sensor for spectrometry and nanometrology

Integrated nano-opto-electro-mechanical sensor for spectrometry and nanometrology

Fully integratable spectrometers have trade-offs between size and resolution. Here, the authors present a nano-opto-electro-mechanical system where the functionalities of transduction, actuation and detection are fully integrated, resulting in an ultra-compact high-resolution spectrometer with a mic...

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Bibliographic Details
Main Authors: Žarko Zobenica, Rob W. van der Heijden, Maurangelo Petruzzella, Francesco Pagliano, Rick Leijssen, Tian Xia, Leonardo Midolo, Michele Cotrufo, YongJin Cho, Frank W. M. van Otten, Ewold Verhagen, Andrea Fiore
Format: Article
Language:English
Published: Nature Portfolio 2017-12-01
Series:Nature Communications
Online Access:https://doi.org/10.1038/s41467-017-02392-5

Internet

https://doi.org/10.1038/s41467-017-02392-5

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