Physical-Mechanical Properties of Superhard Nanocomposite Coatings on Base Zr-Ti-Si-N
<span>Hard and super hard coatings of Zr-Ti-Si-N of from 2.8 μm to 3.5 μm thickness were fabricated using a vacuum arc source with high frequency stimulation. The samples were annealed in vacuum and in air at 1200<sub> </sub>°C. It was found that films with a high Zr and Ti content...
Main Authors: | , , , , , , , |
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Format: | Article |
Language: | English |
Published: |
Kaunas University of Technology
2013-05-01
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Series: | Medžiagotyra |
Subjects: | |
Online Access: | http://matsc.ktu.lt/index.php/MatSc/article/view/4429 |