Synthesis and Characterization of Carbon Nitride Films for Micro Humidity Sensors
Nano-structured carbon nitride (CNx) films were synthesized by a reactive RFmagnetron sputtering system with a DC bias under various deposition conditions, and theirphysical and electrical properties were investigated with a view to using them for microhumidity sensors. The FTIR spectra of the depos...
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| Format: | Article |
| Language: | English |
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MDPI AG
2008-03-01
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| Series: | Sensors |
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| Online Access: | http://www.mdpi.com/1424-8220/8/3/1508/ |