Novel Miniature and Selective Combustion-Type CMOS Gas Sensor for Gas-Mixture Analysis—Part 1: Emphasis on Chemical Aspects

Novel Miniature and Selective Combustion-Type CMOS Gas Sensor for Gas-Mixture Analysis—Part 1: Emphasis on Chemical Aspects

There is an ongoing effort to fabricate miniature, low cost, sensitive, and selective gas sensors for domestic and industrial uses. This paper presents a miniature combustion-type gas sensor (GMOS) based on a thermal sensor, where a micromachined CMOS−SOI transistor integrated with a catal...

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Bibliographic Details
Main Authors: Dima Shlenkevitch, Sara Stolyarova, Tanya Blank, Igor Brouk, Yael Nemirovsky
Format: Article
Language:English
Published: MDPI AG 2020-03-01
Series:Micromachines
Subjects:
catalytic gas sensor
cmos–soi–mems
selectivity
pt nanoparticle
inkjet printing
Online Access:https://www.mdpi.com/2072-666X/11/4/345

Internet

https://www.mdpi.com/2072-666X/11/4/345

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