An approach for one dimensional periodic arbitrary lithography based on Fourier series
In interference lithography, 1-dimensional (1D) Fourier series expansion (FSE) technique can be used to create 1D periodic arbitrary patterns. Since the energy of electric field can change the solubility of photoresist, the required electric field intensity to create the desired pattern should be fo...
| Main Authors: | , , , |
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| Format: | Article |
| Language: | English |
| Published: |
Elsevier
2021-04-01
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| Series: | Engineering Science and Technology, an International Journal |
| Subjects: | |
| Online Access: | http://www.sciencedirect.com/science/article/pii/S2215098620342051 |