Interference Confocal Microscope Integrated with Spatial Phase Shifter

Interference Confocal Microscope Integrated with Spatial Phase Shifter

We present an interference confocal microscope (ICM) with a new single-body four-step simultaneous phase-shifter device designed to obtain high immunity to vibration. The proposed ICM combines the respective advantages of simultaneous phase shifting interferometry and bipolar differential confocal m...

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Bibliographic Details
Main Authors: Weibo Wang, Kang Gu, Xiaoyu You, Jiubin Tan, Jian Liu
Format: Article
Language:English
Published: MDPI AG 2016-08-01
Series:Sensors
Subjects:
confocal microscope
interference
phase shift
spatial phase shifter
Online Access:http://www.mdpi.com/1424-8220/16/9/1358

Internet

http://www.mdpi.com/1424-8220/16/9/1358

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