Interference Confocal Microscope Integrated with Spatial Phase Shifter
We present an interference confocal microscope (ICM) with a new single-body four-step simultaneous phase-shifter device designed to obtain high immunity to vibration. The proposed ICM combines the respective advantages of simultaneous phase shifting interferometry and bipolar differential confocal m...
Main Authors: | Weibo Wang, Kang Gu, Xiaoyu You, Jiubin Tan, Jian Liu |
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Format: | Article |
Language: | English |
Published: |
MDPI AG
2016-08-01
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Series: | Sensors |
Subjects: | |
Online Access: | http://www.mdpi.com/1424-8220/16/9/1358 |
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