Thermal Conductivity Gas Sensors for High-Temperature Applications

Thermal Conductivity Gas Sensors for High-Temperature Applications

This paper describes a fast and flexible microfabrication method for thermal conductivity gas sensors useful in high-temperature applications. The key parts of the sensor, the microheater and the package, were fabricated from glass-coated platinum wire and the combination of laser micromilling (abla...

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Bibliographic Details
Main Authors: Nikolay Samotaev, Boris Podlepetsky, Mikhail Mashinin, Igor Ivanov, Ivan Obraztsov, Konstantin Oblov, Pavel Dzhumaev
Format: Article
Language:English
Published: MDPI AG 2024-01-01
Series:Micromachines
Subjects:
thermal conductivity
ceramic
platinum wire
micromachining
laser micromilling
Online Access:https://www.mdpi.com/2072-666X/15/1/138

Internet

https://www.mdpi.com/2072-666X/15/1/138

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