Broadband Polarization Rotator and Splitter Based on 70 nm-Etched Waveguides on SOI Platform

Broadband Polarization Rotator and Splitter Based on 70 nm-Etched Waveguides on SOI Platform

The standard silicon photonic platforms provide three-step silicon etching, i.e., 220 nm for full etching, 70 nm for shallow etching, and 130 nm (or 150 nm) for slab etching. Previously reported mode-evolution-based polarization rotators and splitters (PSRs) usually employ 130 nm-etched slab wavegui...

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Bibliographic Details
Main Authors: Ye Tian, Zhe Kang, Tingge Dai, Peipeng Xu, Yan Li, Yegang Lv, Xiaowei Zhang
Format: Article
Language:English
Published: MDPI AG 2022-10-01
Series:Photonics
Subjects:
polarization delivery
silicon photonics
silicon passive devices
Online Access:https://www.mdpi.com/2304-6732/9/10/758

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