Photoacoustic Characterization of TiO<sub>2</sub> Thin-Films Deposited on Silicon Substrate Using Neural Networks

Photoacoustic Characterization of TiO<sub>2</sub> Thin-Films Deposited on Silicon Substrate Using Neural Networks

In this paper, the possibility of determining the thermal, elastic and geometric characteristics of a thin TiO<sub>2</sub> film deposited on a silicon substrate, with a thickness of 30 μm, in the frequency range of 20 to 20 kHz with neural networks were analysed. For this purpose, the ge...

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Bibliographic Details
Main Authors: Katarina Lj Djordjević, Dragana K. Markushev, Marica N. Popović, Mioljub V. Nesić, Slobodanka P. Galović, Dragan V. Lukić, Dragan D. Markushev
Format: Article
Language:English
Published: MDPI AG 2023-04-01
Series:Materials
Subjects:
thin-film
TiO<sub>2</sub>
photoacoustic
artificial neural networks
thermal diffusion
thermal expansion
Online Access:https://www.mdpi.com/1996-1944/16/7/2865

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https://www.mdpi.com/1996-1944/16/7/2865

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