CuO-Ga<sub>2</sub>O<sub>3</sub> Thin Films as a Gas-Sensitive Material for Acetone Detection
The p-n heterostructures of CuO-Ga<sub>2</sub>O<sub>3</sub> obtained by magnetron sputtering technology in a fully reactive mode (deposition in pure oxygen) were tested under exposure to low acetone concentrations. After deposition, the films were annealed at previously confi...
Main Authors: | , , , , , |
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Format: | Article |
Language: | English |
Published: |
MDPI AG
2020-06-01
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Series: | Sensors |
Subjects: | |
Online Access: | https://www.mdpi.com/1424-8220/20/11/3142 |