A resolution improvement of measuring the pitch deviation of a diffraction scale grating based on the change in angles of diffraction of diffracted beams
An investigation is carried out through experiments and numerical calculations for the improvement of the resolution of measuring the pitch deviation of a diffraction scale grating with the diffracted beams. Since the changes in angles of diffraction of the diffracted beams detected by an optical he...
| Main Authors: | , |
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| Format: | Article |
| Language: | English |
| Published: |
The Japan Society of Mechanical Engineers
2024-06-01
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| Series: | Journal of Advanced Mechanical Design, Systems, and Manufacturing |
| Subjects: | |
| Online Access: | https://www.jstage.jst.go.jp/article/jamdsm/18/4/18_2024jamdsm0036/_pdf/-char/en |